Filtration

Filters for Microelectronics Applications


Advanced Membrane Technology

Gore, the world leader in PTFE membrane technology for critical filtration applications, offers hydrophilic, water-wettable filter cartridges suitable for aqueous chemicals used in microelectronics fabrication.

GORE® Filters for aqueous chemical applications provide superior flow and retention performance compared to next best-in-class products. These performance advantages deliver substantial improvements in process economics and reduced cost of ownership.

Utilizing a revolutionary hydrophilic PTFE membrane, GORE® Filters offer:

  • More than twice the flow capability of next best-in-class filters
  • Superior particle capture and finer contaminant removal
  • Higher porosity for longer life and low differential pressure
  • No pre-wetting required, wets out in aqueous chemicals


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Recommended Aqueous Chemical Filtration Applications

Product Process
HDD Substrate Processes Nickel plating, post-polish cleaning, rinse baths
HDD Media Processes Alkali cleans, megasonic cleaning, rinse baths
HGA / HSA Assembly Parts washing, ultrasonic baths
LCD Panel Manufacturing Chemical supply systems, final rinse baths
OLED Panel Manufacturing Glass washing, dilute chemicals, rinse baths

Process Chemical Filtration Applications

Product Process
Microelectronics Fabrication Acids, Bases, Solvents, Chemical Delivery
HDD Manufacturing & Assembly Wet Cleans, Surface Prep, Plating
TFT — LCD Processes CF Resists, Strippers, Glass Etch
Compact Disc and DVD Mfg Solvents, Coatings, Cleaning Solutions
PV Manufacturing & Cell Assembly Chemical Baths, Etchants

DI Water Rinse Bath Applications

Product Process
Hard Disc Drive Media Megasonic Rinse, Spray and QDR Baths
Hard Disc Drive Heads UPW Supply and Recirculation, HSA Wash
CD / DVD Media Substrate Rinse, Disc Washing, DIW Supply
LCD – FPD – OLED Cascade Stations, DI Shower, Final Rinse
Photovoltaic / Solar Cells Silicon Wafer Rinse, Cell Assembly Rinse


FOR MICROELECTRONICS USE ONLY.

Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.